JPH0733144Y2 - 圧力検出装置 - Google Patents
圧力検出装置Info
- Publication number
- JPH0733144Y2 JPH0733144Y2 JP12189989U JP12189989U JPH0733144Y2 JP H0733144 Y2 JPH0733144 Y2 JP H0733144Y2 JP 12189989 U JP12189989 U JP 12189989U JP 12189989 U JP12189989 U JP 12189989U JP H0733144 Y2 JPH0733144 Y2 JP H0733144Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- thin portion
- sensitive
- light
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 210000001367 artery Anatomy 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12189989U JPH0733144Y2 (ja) | 1989-10-18 | 1989-10-18 | 圧力検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12189989U JPH0733144Y2 (ja) | 1989-10-18 | 1989-10-18 | 圧力検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360044U JPH0360044U (en]) | 1991-06-13 |
| JPH0733144Y2 true JPH0733144Y2 (ja) | 1995-07-31 |
Family
ID=31669921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12189989U Expired - Fee Related JPH0733144Y2 (ja) | 1989-10-18 | 1989-10-18 | 圧力検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733144Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4822418B2 (ja) * | 2006-01-11 | 2011-11-24 | 株式会社 エピア | 太陽電池付き屋根材 |
-
1989
- 1989-10-18 JP JP12189989U patent/JPH0733144Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0360044U (en]) | 1991-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |